Shape Memory Microactuators

Manfred Kohl

• Paperback | Engels | Microtechnology and Mems
• Overview of recent achievements, describing the microactuator development of microvalves and liner actuators comprehensively from concept through prot... Lees meer

Piezoceramic Sensors

Valeriy Sharapov

• Hardcover | Engels | Microtechnology and Mems
• Piezoceramic Sensors provides an up-to-date overview of various types of piezosensors. Readers will gain an understanding of the fundamentals, technic... Lees meer

Fast Simulation of Electro-Thermal Mems

Tamara Bechtold, Evgenii B Rudnyi, Jan G Korvink

• Hardcover | Engels | Microtechnology and Mems
• Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compac... Lees meer

Silicon Microchannel Heat Sinks

Lian Zhang, Kenneth E Goodson, Thomas W Kenny

• Paperback | Engels | Microtechnology and Mems
• There is significant current interest in new technologies for IC (Integrated Circuit) cooling, driven by the rapid increase in power densities in ICs ... Lees meer

Force Sensors for Microelectronic Packaging Applications

Jürg Schwizer, Michael Mayer, Oliver Brand

• Hardcover | Engels | Microtechnology and Mems
• Intended for wire-bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors, this... Lees meer

Thermal Transport for Applications in Micro/Nanomachining

Basil T Wong, Pinar M Mengüç

• Paperback | Engels | Microtechnology and Mems
• Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice str... Lees meer

Surface Tension in Microsystems

• Hardcover | Engels | Microtechnology and Mems
• This book describes how surface tension effects can be used by engineers to provide mechanical functions in miniaturized products (<1 mm). Even if pre... Lees meer

CMOS Hotplate Chemical Microsensors

Markus Graf, Diego Barrettino, Henry P Baltes, Andreas Hierlemann

• Hardcover | Engels | Microtechnology and Mems
• This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor pro... Lees meer

Piezoelectric Multilayer Beam Bending Actuators

Rüdiger G Ballas

• Hardcover | Engels | Microtechnology and Mems
• An important aim of the presented book is the explanation of the application of piezoelectric materials such as piezoceramics within the wide field of... Lees meer

Piezoelectric Multilayer Beam Bending Actuators

Rüdiger G Ballas

• Paperback | Engels | Microtechnology and Mems
• An important aim of the presented book is the explanation of the application of piezoelectric materials such as piezoceramics within the wide field of... Lees meer

Micromachines as Tools for Nanotechnology

• Hardcover | Engels | Microtechnology and Mems
• This book addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, ... Lees meer

Piezo-Electric Electro-Acoustic Transducers

Valeriy Sharapov, Zhanna Sotula, Larisa Kunickaya

• Hardcover | Engels | Microtechnology and Mems
• Electroacoustic transducers (EAT) are devices, which transform electric energy to energy of acoustic fluctuations. Principles of action, design of tra... Lees meer

CMOS Cantilever Sensor Systems

D Lange, O Brand, H Baltes

• Hardcover | Engels | Microtechnology and Mems
• This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the deve... Lees meer

Electromechanical Systems in Microtechnology and Mechatronics

Arno Lenk, Rüdiger G Ballas, Roland Werthschützky, Günther Pfeifer

• Paperback | Engels | Microtechnology and Mems
• Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. pre... Lees meer

CMOS Hotplate Chemical Microsensors

Markus Graf, Diego Barrettino, Henry P Baltes, Andreas Hierlemann

• Paperback | Engels | Microtechnology and Mems
• This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor pro... Lees meer

Piezotronics and Piezo-Phototronics

Zhong Lin Wang, Yan Zhang, Weiguo Hu

• Hardcover | Engels | Microtechnology and Mems
• Co-authored by the discoverer of the piezotronic effect, this book is a fundamental and comprehensive survey of piezotronics and piezo-phototronics. P... Lees meer

Silicon Microchannel Heat Sinks

Lian Zhang, Kenneth E Goodson, Thomas W Kenny

• Hardcover | Engels | Microtechnology and Mems
• There is significant current interest in new technologies for IC (Integrated Circuit) cooling, driven by the rapid increase in power densities in ICs ... Lees meer

Advanced Analytical Methods in Tribology

• Hardcover | Engels | Microtechnology and Mems
• This book presents the basics and methods of nanoscale analytical techniques for tribology field. It gives guidance to the application of mechanical, ... Lees meer

Integrated Chemical Microsensor Systems in CMOS Technology

Andreas Hierlemann

• Paperback | Engels | Microtechnology and Mems
• This book provides a comprehensive treatment of the very interdisciplinary ?eld of CMOS technology-based chemical microsensor systems. It is, on the o... Lees meer

Capillary Forces in Microassembly

Pierre Lambert

• Paperback | Engels | Microtechnology and Mems
• This book explains the use of capillary forces as a gripping principle in microscale assembly. Clearly written and well organized, the text integrates... Lees meer

Thermal Transport for Applications in Micro/Nanomachining

Basil T Wong, Pinar M Mengüç

• Hardcover | Engels | Microtechnology and Mems
• Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice str... Lees meer

CCD Image Sensors in Deep-Ultraviolet

Flora Li, Arokia Nathan

• Paperback | Engels | Microtechnology and Mems
• As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. Fo... Lees meer

Capillary Forces in Microassembly

Pierre Lambert

• Hardcover | Engels | Microtechnology and Mems
• This book explains the use of capillary forces as a gripping principle in microscale assembly. Clearly written and well organized, the text integrates... Lees meer

Mechanical Microsensors

M Elwenspoek, R Wiegerink

• Paperback | Engels | Microtechnology and Mems
• This book presents a microtechnology important for manufacturing, design and application of microdevices. It appeals to engineers and advanced student... Lees meer